MNT Clean Room

MNT Clean Room

IEEC


Barcelona


The micro and nanotechnologies laboratory is a class 1000 clean room for the fabrication of micro and nanoelectronic devices (class 100 in some critical areas).


The micro and nanotechnologies laboratory is a class 1000 clean room for the fabrication of micro and nanoelectronic devices (class 100 in some critical areas). It is equipped with various equipment for deposition and growth of materials, as well as two aligners for lithography and device characterization equipment. The laboratory’s research focuses on a variety of areas (photovoltaic solar cells, sensors for planetary exploration, nanoparticles, photonic crystals, micrometer-scale liquid handling technologies, etc.).


Scientific-Technical Services. Philab access conditions: rates (VAT excluded):

  • Sputtering: €75.36 / hour
  • Evaporator: €83.38 / hour
  • PECVD: €69.59 / hour
  • ALD: €59.37 / hour
  • Photolithography: €77.84 / hour
  • Cleanroom use (with personnel): €430 / day
  • Cleanroom use (without personnel): €220 / day