Nano-Photonics, Nano-Optoelectronic Materials and Bio-Nano-Materials Manufacturing and Characterization platform (NM3)
Partner
ICFO
Location
Mediterranean Technology Park, Avinguda Carl Friedrich Gauss, 3, 08860 Castelldefels, Barcelona
Functionalities
This platform focuses on nanophotonics and nanooptoelectronics manufacturing and characterization, featuring 600m2 cleanrooms with micro/nanofabrication equipment, nanocaracterization tools, super-resolution optical microscopy, chemistry and post-processing labs, and mechanical and electronic engineering services.
Equipment
- SEM-FEG FEI Inspect F50 (+ Raith Elphy Plus)
- EBL CRESTEC CABL-9510C
- SEM FEI Quanta 200 (+ Raith Elphy Quantum)
- Heidelberg MLA 150
- Evaporator Leybold Univex 350
- Evaporator Lesker LAB18
- Sputtering AJA Orion 8 HV
- ALD Cambridge Nanotech Savannah 200
- Coater Leica ACE 600
- RIE Oxford Instruments Plasmalab System 100
- ICP 180
- PVA TePla 300 SEMI-AUTO
- FIB Zeiss Auriga CrossBeam
- FIB Zeiss Orion NanoFab
https://www.icfo.eu/research/facilities/nm3
List of services and rates
| FEI + RAITH | Electron Beam Lithography | 73,30 € |
| CRESTEC | Electron Beam Lithography | 80,20 € |
| FEI + RAITH | Electron Beam Lithography | 96,60 € |
| HEIDELBERG | Optical Maskless Lithography | 65,30 € |
| LEYBOLD | Thin Film Deposition | 41,60 € |
| KURT J. LESKER | Thin Film Deposition | 46,40 € |
| AJA | Thin Film Deposition | 38,40 € |
| CAMBRIDGE NANOTECH | Thin Film Deposition | 28,70 € |
| LEICA | Thin Film Deposition | 25,90 € |
| OXFORD INSTRUMENTS | Dry Etching | 104,50 € |
| PVA TePla | Dry Etching | 23,00 € |
| ZEISS | Focused Ion Beam | 113,80 € |
| ZEISS | Focused Ion Beam | 133,70 € |
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